Driving Innovation and Co-Creation with Vacuum Technology at Our Core
We have long provided products and materials based on vacuum technology that is essential to a wide range of industries. With our integrated group-wide development organization, we create high value-added products and technologies through innovative and advanced R&D to meet the speed requirements of overseas device manufacturers and to satisfy the explicit and latent needs of our customers.
Accelerating Focus on Semiconductors & Electronic Devices
We are strengthening technological capabilities in logic, memory, and advanced packaging—expanding our Metal Hard Mask (MHM) process for advanced logic and entering new process steps for DRAM and 3D NAND flash memory. Additionally, in the advanced packaging field, which contributes to energy efficiency and where higher device density and performance improvements are accelerating, we are enhancing our deposition and processing technologies, while introducing ENTRON-EXX as a next-generation semiconductor manufacturing system.
Advancement & Exploration of Core Vacuum Technologies
Led by the Institute of Advanced Technology, we enhance equipment functionality, reliability, and productivity to support next-generation manufacturing processes. Simultaneously, we actively explore promising next-generation fields. These include lithium metal anode production technology under NEDO's Green Innovation (GI) Fund and advanced dilution refrigerator systems for quantum computing under the JST Moonshot Program.
Global Co-Creation & Intellectual Property Governance
We actively participate in advanced R&D programs such as imec and the "US-JOINT" consortium and explore new vacuum applications through close customer collaboration at global technology centers, including the Technology Center in Pyeongtaek, Korea. We also foster collaborative partnerships with top-tier domestic universities such as Institute of Science Tokyo and Osaka University, while implementing open-close strategies based on IP landscapes and backcasting-driven IP planning.
